A study of resolution limits in standard rapid prototyping vacuum cast molding processes and
adaptation of this technique to reach submicron accuracy is proposed. Micro-fabrication
technologies are used to fabricate micron and submicron high aspect-ratio patterns on the
original parts. The molding of the original parts is optimized to allow replication of submicron
features. In carefully exploring materials and surface treatments, cast parts are successfully
replicated with submicron and high aspect ratio micron structures. These encouraging results
enable the use of such processes for micro- and nano-systems applications and open the door
to development and production of low cost, high resolution biochips.Mechanical Engineerin
