2001-2002 > Academic research: refereed > Publication in refereed journalVersion of RecordPublishe

Chan, HLW

Li, J

Li, K

Tong, KY

Yuan, N

2001-2002 > Academic research: refereed > Publication in refereed journalVersion of RecordPublishedVoR allowe

PolyU Institutional Repository

Au /PLT /Pt??????????? 李金华　袁宁一(??????????????? ,?? , 213016)李　坤②　汤国英①　陈王丽华②(①?????????????? ;②????? ,?? )19990823?? , 20000225?????: ? Sol-Gel????? PLT [( Pb0. 83La0. 17 ) TiO3 ]???? ,??????????????????? ,??? Au / PLT / Pt????????、????、??、????????????。 ???? 0. 4μm??? , 5 V???????? P r= 22μC /cm2 ,????? Ec = 60kV /cm,??????? 1 300,??? Id= 3. 2× 10- 8 A /mm2 ,??????。 ?????? ,?Vpp= 10 V????? ,? 4. 5× 1011??? ,???????? 20%。?????? ,? PLT????????????????。???: ?????? ;??????? ;?????????????: TN384　　?????: A　　????: 1000-3819( 2001) 03-354-07Electrical Properties of Au /PLT /PtFerroelectric Film CapacitorLI Jinhua　 YUAN Ningyi(Functional Materials Lab. J iangsu Institute ofPetrochemical Technology , Changz hou , 213016, C HN )LI Kun②　 TONG K Y①　 CHAN H L W②(①Dept. of Electronic Information Engineering;②Dept . Applied Phy sics, Hong Kong Polytechnic University , Kow loon , CHN )Abstract: Th e PLT [ ( Pb0. 83 La0. 17 ) TiO3 ] thin film was prepa red by a Sol-Gelmethod acco rding to the requirements of non-volati le ferroelct ric random accessmemory ( FERAM ) on ferroelect ric capaci to r. The electrical properties, such as thehysteresis loop, dielectric constant , leakage cur rent , fa tigue and swi tchingcha racteristic w ere mea sured. The results show that the pola riza tion swi tching isexcellent, the remanent po la rization is about P r= 22μc /cm2 , coerciv e field is Ec= 60kV /cm, effectiv e dielectric constant K df= 1300, leakage current Id= 3. 2× 10- 8 A /第 21卷　第 3期2001年 8月 　　　　　??????????RESEARCH& PROGRESS OF SSE　　　　　　 Vol. 21, No . 3Aug . , 2001 ?????? RGC(??????? )??????mm2for a 0. 4μm PLT fi lm at 5 V. Fatigue measurement i llust rated the remanentpolariza tion P r was reduced by 20% af ter 4. 5× 1011 cycles at a peak to peak vo ltag e,Vpp= 10 V o f saw too th signal.Key words: PLT thin film; f erroelectric film capacitor; FERAMEEACC: 2810F　　 1265D　 0520PACC: 7780　 73601　引　　言???????????????????????? ( EEPROM )?? ,????????? ( FERAM )???????? [1～ 3 ]: ( 1)????? ,??? EEPROM?????? 10～ 100μs,? FERAM?????? 10 ns; ( 2)????? ,?? EEPROM?????? 10～ 12 V , FERAM? 2～ 5 V; ( 3)??? ,???????????????? , EEPROM?FERAM?? 2 000? ; ( 4)?????? , EEPROM?? 105～ 106? ,? FERAM???1012? ; ( 5)??? ,?? FERAM??????????????????? ,? β??、 X????????? EEPROM; ( 6)??????? ,?????????????? 1 000?? ,?????????????????? (??? 3. 9? 7. 0)。 ?? ,???????? ,???????????? ,???????????。 ?? ,????????? ,??????????????? [4, 5 ] ,???? ( PZT)???????、???????。??? ,???????????????? ,??????????? SBT ( SrBi2 Ta2O9 )??? [6 ] ,????????????、?????? ( PLD)、???????????( MO CVD)、?? -??? ( So l-Gel)?????。??? Sol-Gel????????? ( PLT)?? ,????????? ,??????? ,?????????????? ,?? FERAM???????????。2　溶胶与样品制备? La2O3??????????? ,?????????? 99. 98%。?????????????????? ,?????? ,????????????????。?? ,?????? ,????。 ?? ,???? N, N-?????? ( DM F) ,???? ,???????????。?? ,????????????? ,?????? ,????????。??????????????????。PLT????????????????。 ????? 0. 5 mol· L- 1 ,?? 3 000? /? ,?? 40?。??? Pt /Ti /SiO2 /Si????。??????:?Υ76 mm、 n? < 100> Si???? ,????? 500 nm SiO2 ,???????????? ,??? 15 nm Ti ,???? 80nm Pt。 X???? ( X RD)???? ,?? Pt???? < 111> ??。 Sol-Gel??????????????????? ( RTP)?????????? ,??????????? 150℃ ,5?? ,?????????????。????? 400℃ , 5?? ,????????? ,??3553? ????: Au /PLT /Pt??????????? 　??????????? PbO、 TiO2? La2O3。???????? 630℃ ,? 5????? ,??、?????? 2?? ,?????? 5??。??、??????????????。????????????。???????? ,??????????????? ,???????? ,???? 100 nm?? Au???? ,??? 350℃? N2??? 15?? ,?? Au /PLT /Pt????。3　测试与结果??????? X?????? ,????????λ= 0. 154 nm? Cu?? Kαα??。????????? 40 kV ,??? 35 mA。??????????α?????。? 0. 5 mo l· L- 1??? ,??????? ,?????????? ,? 80 nm,????????????????????????????。 ??????????? Radiant Techno logies????? RT66A???????????、??????、?????? (?????? )、???????? (?? 1 MHz??? )??。 ? 1?????? XRD?。? 2????????????? 5 V??????。? 3???? 2 V? 12 V???????????。? 4???? 0. 4μm??????????????。? 5?????????? RT66A????????? (?????? )。? 6????????????? 14 V? 10 V??????????。　　　? 1　 PLT?? XRD?　　　　　　　　　　　　　? 2　 Au /PL T /Pt???????　 Fig. 1　X RD spectrum o f PLT thin film　　　　　　　 Fig. 2　 P-E loop o f Au /PLT /Pt capacito r4　讨　　论??????????????????????? ,?? Au /PLT /Pt???????????。356 　?　?　?　?　?　?　?　?　?　?　　　　　　　　　　　 21?4. 1　??????FERAM??????????????? P r≥ 10μC /cm2。?? FERAM??????????????? ,?? P r????????。?? 2?? 3?? , 5 V?????? P r= 22μC /cm2 ,???????????????????。??????? RT66A?? ,???????“?????????”?? [3 ] ,???????????。 ????? P r???????????。 ?? 1?? ,???????? < 100> < 001> ??。???? ,??La?????????? PbTiO3????? [8 ] ,??? La?????? ,????? a????? , c????? [ 9] ,? < 001> ?? < 100> ?????。 ??? Pb /La= 83 /17???。? < 111> Pt?????? PLT????? ,????? ,??????????、??????? ,????????????????。4. 2　????????? FERAM??????????????“ 0”?“ 1”????? ,????“??”??。?? 3?? ,?????????? 3 V??? 4 V? ,?????????? 1. 2μC /cm2??? 21μC /cm2 ,?? 4 V??? 12 V, P r?????? 4μC /cm2。??????????????? 3～ 4 V? ,????????????。??? 2?????????????????????? ,???????????? FERAM????????。 ??????“??”?????????????????????????????。? 3　????? PLT?????????　　　　? 4　 PLT??????????????　　　　 Fig. 3　 The remanent polarization of　　　　　　　 Fig. 4　 The effect dielectric constant ofAu /PLT /Pt capacito r PLT film versus applied vo ltag e4. 3　????FERAM???????????? CMO S??????? ,? V≤ 5 V。????3573? ????: Au /PLT /Pt??????????? 　EEPROM???????????????。???????? , 4～ 5 V????????????????????。? 0. 4μm?? PLT? ,?????? Vc≤ 2. 5 V ,?????? Ec? 60 kV /cm2。 ???? CMO S????????、????。4. 4　????? 4????? RT66A????????? K ef。???? K ef= Cd /X0S ,???????。?? C???????????????? ,d??? , S????? ,X0???????。???????????????? ,????????????????? [ 10]。?? ,??????????????。????????? HEWLET T4194A???????????????????? ,????? 0. 01 V?????? ,??? RT66A??? K ef?????。???? ,??????? K ef????????。?? 4?? ,????? 5 V?? K ef= 1 300,??????????????????? (??? 3. 9? 9. 0)。???? ,?????? 0. 4μm, 10μm× 10μm??? PLT??????? 2. 9 pF。???????。?????????????????。4. 5　????????? FERAM???????????。 ? 5??? 5 V?????? Id=3. 2× 10- 8 A /mm2。?????????? ( PLD)????? PLT?????????? [11 ]。?????? ,? So l-Gel? ,?????????。??????? ,? 10μm× 10μm????? ,?????? 3. 2× 10- 13 A。???? ,???????????、?????、??、????????????????。??: ?????????????????????????、??? ,????????????????、???。　? 5　 Au / PLT / Pt????　　　　　　　　　　　　　　? 6　 Au /PLT /Pt???????　 Fig. 5　 The leakage density o f Au /PLT /Pt capacito r　　　　 Fig. 6　 Fa tigue property of PLT film358 　?　?　?　?　?　?　?　?　?　?　　　　　　　　　　　 21?4. 6　??????????? ,?????????????? ,??????????? ,?FERAM??????? ,??????。???? ,????? ,?????? , Pr????? ,??????。? 6????????????????。?????????????Vpp= 10 V? ,? 4. 5× 1011??? ,?????? P r????????? 82% 。? Vpp= 14V? ,? 5× 1010???? P r???????? 62%。??????????????? ,?????????????? FERAM?????。??????????????? ,???? RuO2????????? Pt? Au?? [12 ]。5　结　　论????、??????????? Sol-Gel?? ,???????????????? ,??? Pt < 111> ????? < 100> < 001> ???? PLT [ ( Pb0. 83 La0. 17 ) TiO3 ]??。????? Au /PLT /Pt??????????:????????? ,???????? ,????????????????。 ????????“??”???? ,??????? ,????? FERAM???????。? ? ? ?1　 Cuppens R, La rsen P K, Spierings G A C M.Fer ro electrics fo r non-vo latile memories.Microelectronic Engineering , 1992; 19: 245～2522　 Jones R E, Jr Mania r P D, Moa zzami R, et al .Fer ro electric non-vo la tile memo ries fo r lowvoltag e low -pow er applications. Thin Solidf ilms , 1995; 270: 584～ 5883　??? .MOS??????????? ,??:??????? , 1987: 344～ 3584　 Da t R, Lee J K, Auciello O , et al . Pulsed laserablation synthesis and char acteriza tion o f layer edPt /SrBi2 Ta2O9 /Pt ferr oelectric capacito rs w ithpr actically no po la ri zation fa tigue. Appl PhysLett , 1995; 67( 4): 572～ 5745　 Al-Shareef H N , Bellur K R, Kingon A L, et al .Influence o f platinum inter la yer s on electricalpr oper ties o f RuO2 /Pb ( Zr0. 53 Ti0. 47 ) O3 /RuO2capacito r heter ost ruc tures. Appl Phys Lett ,1995; 66( 2): 239～ 2416　 Paz de Araujo C A, Cuchiar o J D, Mcmillan L D,et al. Fa tigue-free fer ro electric capacito r s withpla tinum electr odes. Nature , 1995; 374: 627～6297　 Taylo r D J, Jones R E, Zurch er P, et al.Electrica l properties o f SrBi2Ta2O9 thin films andtheir temperature dependence fo r fer ro elec tricnon-vo latile memo ry applications. Appl PhysLett , 1996: 68( 16): 2 300～ 2 3028　 Rossetti G A , Jr Rodriguez M A , Nav ro tsky A,et al. Str uctur e o f the defect perov skite [ Pb0. 85La0. 10 ] TiO3 betw een 10 to 1 023K. J Appl Phys,1995; 77( 4): 1 683～ 1 6899　 Feng Z C, Kwak B S, Eybil A, et al. Ramanscatte ring and X-ray diff raction investiga tions ofhighly tex tured ( Pb1- x Lax ) TiO3 thin films. ApplPhy s Lett , 1994; 64( 18): 2 350～ 2 35210??? .?????? ,??: ????? , 1996:???11 Rao G M , Krupanidhi S B. Pulsed excimer laser3593? ????: Au /PLT /Pt??????????? 　ablation of ( Pb, La) TiO3 thin films fo r dynamicrandom access memo ry dev ices. Appl Phy s Lett ,1994; 64( 12): 1 591～ 1 59312 Lee J J, Thio C L, Desu S B. Elec trode contac tson fe rr oelec tric Pb( Zrx Ti1- x ) O3 and SrBi2Ta2O9thin films and their influence on fa tiguepr oper ties, J Appl Phys, 1995; 78( 8): 5 073～5 078??? ( L I Jinhua )　? ,????? , 1943?????。 1965?????、 1981????????????? ,???????。 ???????????? ,?????。 ??????????????????。 ??????????“??”、“??”?????? ,??????、??????? ,????????????????。 ? SOI???????、????????、??、?????????????????????。??? ( T ANG Guoying )　? , 1971????????????? , 1974????????????? ,????????。 ??? NCR??????。 ? 1977?????????? ,?????????????。 ?????? MOSFET、???????、?????? ,?????? ( Thin Solid Film )????????? 50????。欢迎投稿订阅 ,刊登广告?　?　?　?《????》??? 1980? ,????????? ,????????????????。????: ?????????、????、????????、??????????、????????、?????????、???????、?????????、?????????、?? CAD、???????、??、??、??、???????????、??????、????、????、??????、??????????????????????????。???????????????????????、????、??、??、??????????????、???。《????》????: ????????、?????????????、?????????????????、??????《?????? (??? )》??????、 863?????????、???????????????????????、??《 ULRICH??????》 ( Ulrich Interna tional Periodical Directo ry )、《 IEEE?????—— ????》、????????、??????????????、????????????。????、???????。????????: ISSN1005-6122,??????: CN32-1493 /TN,????????: 3201004980093? ?:??? 1313?? 110??《????》???　　　　　?　?: 210013? ?: 025-3344000-3210　　　　　? ?: 025-3716482　　 ???:???E-mail: njmw@ jlonline. com　　 　 ht tp: / /w bxb. chinajournal. net. cn /360 　?　?　?　?　?　?　?　?　?　?　　　　　　　　　　　 21?

Electrical properties of Au/PLT/Pt ferroelectric film capacitor

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