In this work by energy dispersive analysis of X-rays, scanning electron microscopy and X-ray diffraction methods films of CdxZn1-xTe solid solution, obtained by a close-spaced vacuum sublimation technique under different temperatures of glass substrate, has been studied. Films were deposited by the co sublimation of Cadmium Telluride (CdTe) and Zinc Telluride (ZnTe) chunks, mixed in the ratio of 2:1. The effect of substrate temperature on the surface morphology, elemental and phase composition, lattice parameter, scattering domain sizes has been studied. The results of these studies can be used for obtaining absorber layers of tandem solar cells, basic layers of X-ray and gamma detectors