In this paper, we discuss how a short channel effects can be suppressed and how a threshold voltage
fluctuation can be minimized and better control of subthreshold slope by the impact of the back gate bias and
control of gate work function of a fully depleted SOI (Silicon-On-Insulator) MOSFET. The fluctuation in the
threshold voltage and subthreshold slope are due to short channel effects. The Back gate voltage plays a
significant role on the threshold voltage and thin buried oxide is used to suppress the short-channel effects and
is used to keep a low value of the subthreshold slope are described in this paper. It is shown that how short
channel effects can be suppressed in order to improve subthreshold slope