Murphy, W. L.

Spalding, Faculty Advisor, G. C.

Digital Commons @ Illinois Wesleyan University

Illinois Wesleyan UniversityDigital Commons @ IWUJohn Wesley Powell Student ResearchConference 1998, 9th Annual JWP ConferenceApr 18th, 9:00 AM - 10:30 AMScanning Probe Microscopy Applications ofFerroelectric MaterialsW. L. MurphyIllinois Wesleyan UniversityG. C. Spalding, Faculty AdvisorIllinois Wesleyan UniversityFollow this and additional works at: http://digitalcommons.iwu.edu/jwprcThis Event is brought to you for free and open access by The Ames Library, the Andrew W. Mellon Center for Curricular and FacultyDevelopment, the Office of the Provost and the Office of the President. It has been accepted for inclusion in Digital Commons @ IWU bythe faculty at Illinois Wesleyan University. For more information, please contact digitalcommons@iwu.edu.©Copyright is owned by the author of this document.W. L. Murphy and G. C. Spalding, Faculty Advisor, "Scanning Probe Microscopy Applications of Ferroelectric Materials"(April 18, 1998). John Wesley Powell Student Research Conference. Paper 17.http://digitalcommons.iwu.edu/jwprc/1998/posters/17THE JOHN WESLEY POWELL STUDENT RESEARCH CONFERENCE " APRIL 1998 Poster Presentation 17 SCANNING PROBE MICROSCOPY APPLICATIONS OF FERROELECTRIC MATERIALS W.L. Mumhy and G.C. Spalding* Department of Physics, lllinois Wesleyan University Ferroelectric materials have recently gotten a great deal of attention due to their use as capacitors for integration into non-volatile ferroelectric random access memories (RAMs), and as high dielectric layers in compact capacitors for manufacturing planar dynamic RAMs. The superior piezoelectric property of ferroelectric ceramics also makes them ideal materials for microelectromechanical systems (MEMS). The strong piezoelectric effect allows electromechanical sensing and actuation. Thin films of Ferroelectric materials have been successfully used in a variety of MEMS applications, however, their advantageous properties of have not been fully utilized in scanning probe microscopy (SPM) applications. Furthermore, thin films have been used rather than single crystals due to the difficulty in micromachining single crystal ferroelectric samples. We present some creative device applications of single crystal ferroelectric materials in the context of SPM. 

Scanning Probe Microscopy Applications of Ferroelectric Materials

http://digitalcommons.iwu.edu/cgi/viewcontent.cgi?article=1426&context=jwprc

Scanning Probe Microscopy Applications of Ferroelectric Materials

Abstract

Similar works

Full text

Available Versions

Digital Commons @ Illinois Wesleyan University