Proceedings of International Symposium on Semiconductor Materials and Devices
Abstract
In this paper we have conducted a comprehensive study of the structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. Thin films MgO were prepared by spray pyrolysis technique from a magnesium chloride solution. Identified the phase composition, the lattice constant, crystallite size and coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of homogeneous single-phase films of stoichiometric composition were identified.This research was supported by the Ministry of Education and Science of Ukraine (Grant No. 0113U000131, No. 0112U000772)
