Verfahren zur Herstellung von Dickschichten aus ferroelektrischen Keramiken

Abstract

DE 19817482 A UPAB: 19991215 NOVELTY - Thick ferroelectric ceramic layers are produced by applying a pure organometallic sol-gel solution, heating, applying a ferroelectric ceramic powder dispersion in the sol-gel solution, and then sintering. DETAILED DESCRIPTION - Thick ferroelectric ceramic layers are produced using a dispersion of more than 90 wt.% ferroelectric ceramic powder, comprising PbTiO3-PbZrO3-lead complex perovskite or a mixture of lead complex perovskites optionally with PbTiO3, in an organometallic sol-gel solution. Substrates are coated by initially applying the pure sol-gel solution, heating, applying the dispersion, and then sintering the layers. USE - For producing thick ferroelectric ceramic layers on e.g. silicon, alumina, zirconia or special steel substrates, useful as actuators, sensors, capacitors, vibrators or storage elements, or for ferroelectric printing processes. ADVANTAGE - The process produces crack-free thick layers of about 100 microns thickness, which have good adhesion even on silicon substrates