Bonding technologies for standard bulk PZT ceramics without the need of after process-polarization especially on thin silicon membranes

Authors
Publication date
Publisher

Abstract

Abstract is not available.

    Similar works

    Full text

    thumbnail-image

    Available Versions

    Fraunhofer-ePrints

    redirect
    oaioai:fraunhofer.de:N-218805
    Last time updated on 15/11/2016