MIYAZAKI Shuichi

宮崎 修一

Journal of the Japan Society of Applied Electromagnetics and Mechanics

Tsukuba Repository

形状記憶合金薄膜の開発とマイクロアクチュエータ
への応用(<特集>形状記憶合金研究の新たな展開)
著者 宮崎 修一
雑誌名 日本AEM学会誌 (Journal of the Japan Society of
Applied Electromagnetics)
巻 8
号 4
ページ 439-444
発行年 2000-12
権利 日本AEM学会
本文データは学協会の許諾に基づきCiNiiから複製
したものである
その他のタイトル Development of sputter-deposited shape memory
alloy thin films and their application to
microactuators(Special Issue Reviews)
URL http://hdl.handle.net/2241/114029
The Japan Society Applied Electromagnetics and Mechanics
NII-Electronic Library Service
The Japan Society Applied Electromagnetics and Mechanics
NII-Electronic Library Service
The Japan Society Applied Electromagnetics and Mechanics
NII-Electronic Library Service
The Japan Society Applied Electromagnetics and Mechanics
NII-Electronic Library Service
The Japan Society Applied Electromagnetics and Mechanics
NII-Electronic Library Service
The Japan Society Applied Electromagnetics and Mechanics
NII-Electronic Library Service


Development of sputter-deposited shape memory alloy thin films and their application to microactuators(Special Issue Reviews)

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