Remote plasma atomic layer deposition of TaNx films

Authors
Publication date
1 January 2007
Publisher

Abstract

Abstract is not available.

    Similar works

    Full text

    thumbnail-image

    Available Versions

    Repository TU/e

    redirect
    oaioai:library.tue.nl:634490
    Last time updated on 12/11/2016

    Pure OAI Repository

    redirect
    oaioai:pure.tue.nl:studenttheses/...
    Last time updated on 11/08/2023