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Self consistent radio-frequency wave propagation and peripheral direct current plasma biasing: Simplified three dimensional non-linear treatment in the 'wide sheath' asymptotic regime

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Publication date
1 January 2012
Publisher
'AIP Publishing'
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      oaiinfo:doi/10.1063%2F1.4750046
      Last time updated on 05/06/2019

      Ghent University Academic Bibliography

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