The synthesis of hierarchically assembled Al-doped ZnO layers by Pulsed Laser Deposition (PLD) at room temperature was investigated. PLD was performed in a background pressure of 100 Pa O2 to deposit clusters in a low energy regime and obtain nano- and mesostructures resulting from a hierarchical assembly of nanoclusters. We here analyzed the effects of varying the gas flow rate on mesoscale morphology, mass density and optical properties. The variation of the target-to-substrate distance was also investigated, identifying its effects on mass density and film morphology. The optimization of optical properties in terms of transparency and light scattering capability is of potential interest for photovoltaic applications
