Titanium dioxide (TiO2) thin films were prepared by means of Anodic Spark Deposition (ASD) from thin and flat metallic titanium (Ti) films pre-deposited on high quality quartz slides by electron beam evaporation.
AFM analysis indicates the formation of uniform mesoporous layers and a definite increase (about 50%) of the film thickness upon anodisation.
The oxide mesoporous films have been characterized by XPS and Raman spectroscopy.
Raman spectra of mesoporous TiO2 films were characterized by well-defined peaks related to anatase structure.
An incomplete phase transition from anatase to rutile was observed upon annealing at temperatures up to 900 \ub0C for 3h
