Silicon Carbide Coatings

Abstract

A process is described for forming silicon carbide coatings on nickel based superalloys by: i) nitriding the alloy or depositing a titanium nitride film on the alloy by reactive sputtering; ii) vapour phase chemica deposition of a thin film of titanium nitride; iii) annealing in a nitrogen and hydrogen atmosphere; iv) vapour phase chemical deposition of a silicon carbide layer