CORE
🇺🇦Â
 make metadata, not war
Services
Services overview
Explore all CORE services
Access to raw data
API
Dataset
FastSync
Content discovery
Recommender
Discovery
OAI identifiers
OAI Resolver
Managing content
Dashboard
Bespoke contracts
Consultancy services
Support us
Support us
Membership
Sponsorship
Community governance
Advisory Board
Board of supporters
Research network
About
About us
Our mission
Team
Blog
FAQs
Contact us
Contacting diffusion with FIB for backside circuit edit procedures and material analysis
Authors
Boit C.
Kerst U.
+6Â more
Le Roy E.
Leihkauf R.
Lundquist T.
Sadewater P.
Schlangen R.
Simmnacher B.
Publication date
1 January 2005
Publisher
Abstract
Contacting Diffusion with FIB for Backside Circuit Edit Procedures and Material Analysi
Similar works
Full text
Available Versions
HZB Repository
See this paper in CORE
Go to the repository landing page
Download from data provider
oai:helmholtz.HZB:14601
Last time updated on 12/11/2016