LIGA technique application in micro-optics

Abstract

The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool for mass production of high aspect ratio microstructures and microsystems. The materials used in this process are metals, polymers and also ceramics. For these reasons, the LIGA can be complementary of other micromachining processes. In this paper, we report the different steps of this technique, its applications in micro-optics and its later evolutions