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Growth and characterization of (TaxTi1-x)O2+x/2 thin films on Si substrates by Liquid Injection MOCVD for high-k applications from modified Titanium and Tantalum precursors
Authors
Devi A.
Barreca D.
+7 more
Becker H. W.
Parala H.
Hellwig M.
Fischer R. A.
Katiyar R. S.
Thomas R.
Eugenio Tondello
Publication date
1 January 2010
Publisher
Abstract
Abstract is not available.
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Archivio istituzionale della ricerca - Università di Padova
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oai:www.research.unipd.it:1157...
Last time updated on 12/11/2016
