Waveguides in LiNbO3 are realized by a soft proton exchange (SPE) process with use of a melt of stearic acid highly diluted by lithium stearate. No phase transitions are formed when alpha-phase waveguides are obtained by SPE. The alpha-phase presents the same crystalline structure as that of pure LiNbO3 crystal, and it maintains the excellent nonlinear and electro-optical properties of the bulk material. The kinetics of the SPE method is studied by the use of secondary-ion mass spectrometry and prism-coupling techniques. The hydrogen effec- tive diffusion coefficient as well as the self-diffusion coefficients of H+ and Li+ ions are determined as a func- tion of the proton-exchange temperature for X-cut LiNbO3
