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research
Cr/Sc Multilayer Radiator for Parametric EUV Radiation in "Water-Window" Range
Authors
Jean-Michel Andrґe
Franck Delmotte
+7 more
Philippe Jonnard
Valeriy Viktorovich Kaplin
Alexander Kubankin
Karine Le Guen
Evgueni Meltchakov
Sґebastien de Rossi
Sergey Romanovich Uglov
Publication date
1 January 2015
Publisher
Abstract
Abstract is not available.
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Electronic archive of Tomsk Polytechnic University
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Last time updated on 12/11/2016