'Institute of Electrical and Electronics Engineers (IEEE)'
Doi
Abstract
Cataloged from PDF version of article.The current state of a novel technology, surface
microfabricated ultrasonic transducers, is reported.
Experiments demonstrating both air and water transmission
are presented. Air-coupled longitudinal wave transmission
through aluminum is demonstrated, implying a 110 dB
dynamic range for transducers at 2.3 MHz in air. Water
transmission experiments from 1 to 20 MHz are performed,
with a measured 60 dB SNR at 3 MHz. A theoretical model
is proposed that agrees well with observed transducer behavior.
Most significantly, the model is used to demonstrate
that microfabricated ultrasonic transducers constitute an
attractive alternative to piezoelectric transducers in many
applications
