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Reliability of dielectric less electrostatic actuators in RF-MEMS ohmic switches.
Authors
Pierre Blondy
Aurelian Crunteanu
+4 more
Mohamad El Khatib
David Mardivirin
Arnaud Pothier
O. Vendier
Publication date
27 October 2008
Publisher
HAL CCSD
Abstract
International audienc
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oai:HAL:hal-00358583v1
Last time updated on 12/11/2016
