International audienceThis paper deals with the design of a compact Process, Voltage and Temperature (PVT) probe architecture, in 32nm CMOS technology. The sensor, hereafter named MultiProbe, is composed of 7 different ring oscillators, each one presenting a particular sensitivity to PVT variations. The architecture allows MultiProbes to be chained, so that a single controller is needed. Simulation results exhibit the non-linearity behavior of the ring oscillators under temperature and voltage variations as well as their particular behavior. Due to their small size, the Multiprobe blocks can be easily integrated within a complex digital SoC architecture
