Electron Beam Charging of Insulators with Surface Layer and Leakage Currents

Abstract

International audienceThe electron beam induced selfconsistent charge transport in layered insulators is described by means of an electron-hole fight-drift model FDM and an iterative computer simulation. Ballistic secondary electrons and holes, their attenuation and drift, as well as their recombination, trapping, and detrapping are included. Thermal and field-enhanced detrapping are described by the Poole-Frenkel effect. Furthermore, an additional surface layer with a modified electric surface conductivity is included which describes the surface leakage currents and will lead to particular charge incorporation at the interface between the surface layer and the bulk substrate