Impact of WSix Metal Gate Stoichiometry on Fully Depleted SOI MOSFETs Electrical Properties

Authors
Publication date
1 January 2006
Publisher
Proceedings of Technical Papers

Abstract

International audienc

    Similar works

    Full text

    thumbnail-image

    Available Versions

    Hal - Université Grenoble Alpes

    redirect
    oaioai:HAL:hal-00147166v1
    Last time updated on 11/11/2016