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Silicon Gate etching Using Amorphous Carbon Hard Mask
Authors
H. Bernard
M. Broekaart
+11 more
J.D Chapon
C. Chaton
T. Chevolleau
G. Cunge
M. Gatefait
P. Gouraud
O. Joubert
F. Lazzarino
B. Pelissier
L. Vallier
S. Warrick
Publication date
1 January 2005
Publisher
HAL CCSD
Abstract
International audienc
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Hal - Université Grenoble Alpes
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oai:HAL:hal-00400468v1
Last time updated on 11/11/2016
HAL-CEA
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oai:HAL:hal-00400468v1
Last time updated on 20/03/2019
