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Simulations numeriques dans la fabrication des circuits a semiconducteurs (Process modelling)
Authors
Americo Marrocco
Publication date
1 January 1984
Publisher
HAL CCSD
Abstract
Résumé disponible dans les fichiers attaché
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Hal-Diderot
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oai:HAL:inria-00076252v1
Last time updated on 15/04/2021
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oai:HAL:inria-00076252v1
Last time updated on 10/11/2016