Path dependency as it is described by Arthur and David portrays technological developments as historically embedded, emergent processes. In contrast, Garud and Karnøe's notion of path creation emphasises the role of strategic change and deliberate action for the development of new technologies. In this article, we integrate both concepts into a general understanding of path processes which accounts for emergent as well as deliberate modes of path constitution. In addition, we distinguish between three consecutive phases of technological path developments. Both conceptualisations are used to create an analytical grid against which empirical cases of path processes can be matched. Based on this general understanding, we further outline how concepts from science and technology studies and institutional theory can help to elaborate the role of deliberate action and emergence in the stabilisation of technological paths over time