The Compact Linear Collider (CLIC) is currently under study at CERN as a potential multi-TeV e+e– collider. The manufacturing and assembling tolerances for making the required RF components are essential for CLIC to perform efficiently. Machining techniques are relevant to the construction of ultra-high-precision parts for the Accelerating Structures (AS). Optical-quality turning and ultra-precision milling using diamond tools are the main manufacturing techniques identified to produce ultra-high shape accuracy parts. A shape error of less than 5 μm and roughness of Ra 0.025 are achieved. Scanning Electron Microscopy (SEM) observation as well as sub-micron precision Coordinate Measuring Machines (CMM), roughness measurements and their crucial environment were implemented at CERN for quality assurance and further development. This paper focuses on the enhancements of precision machining and characterizing the fabrication of AS parts