As a first step towards real time, multivariable control of an argon/
oxygen plasma, the implementation of real time control of ion flux in an
inductively coupled argon plasma through modulation of the RF power is described.
It is demonstrated that an elementary PID controller does not guarantee
stable control of ion flux over a range of operating points and hence that more
elaborate control strategies must be considered. The design and testing of control
algorithms is facilitated by suitable dynamical models of a process. A model of
the inductively coupled plasma chamber which is suitable for control simulations
is described. Ongoing and future work are discussed