On the modelling and closed loop control of an inductively coupled plasma chamber

Abstract

As a first step towards real time, multivariable control of an argon/ oxygen plasma, the implementation of real time control of ion flux in an inductively coupled argon plasma through modulation of the RF power is described. It is demonstrated that an elementary PID controller does not guarantee stable control of ion flux over a range of operating points and hence that more elaborate control strategies must be considered. The design and testing of control algorithms is facilitated by suitable dynamical models of a process. A model of the inductively coupled plasma chamber which is suitable for control simulations is described. Ongoing and future work are discussed