Feidenhans'l, Nikolaj Agentoft

Hansen, Poul-Erik

Petersen, Jan C.

Pilny, Lukas

Taboryski, Rafael J.

Online Research Database In Technology

                       General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.  • Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal   If you believe that this document breaches copyright please contact us providing details, and we will remove access to the work immediately and investigate your claim.     Downloaded from orbit.dtu.dk on: Nov 09, 2017Optical characterization of roughness on polished steel surfacesFeidenhans'l, Nikolaj Agentoft; Hansen, Poul-Erik; Pilny, Lukas; Petersen, Jan C.; Taboryski, Rafael J.Publication date:2015Document VersionPeer reviewed versionLink back to DTU OrbitCitation (APA):Feidenhans'l, N. A., Hansen, P-E., Pilny, L., Petersen, J. C., & Taboryski, R. J. (2015). Optical characterizationof roughness on polished steel surfaces. Abstract from Polymer Replication on Nanoscale 2015, Kgs. Lyngby,Denmark.  Optical characterization of roughness on polished steel surfaces   Nikolaj A. Feidenhans’l1,2, Poul-Erik Hansen1, Lukas Pilný3, Jan C. Petersen1,  Rafael Taboryski2 1Danish Fundamental Metrology A/S (DFM), Kgs. Lyngby, Denmark.  2DTU Nanotech, Technical University of Denmark (DTU), Kgs. Lyngby, Denmark.  3DTU Mechanical Engineering, DTU, Kgs. Lyngby, Denmark. Contact: naf@dfm.dk  To fabricate nanostructured polymer devices by injection molding set strict demands on the smoothness of the mold master. Structuring a surface requires that the surface do not have roughness above the feature length scale, but preferably far below. For nanoscale structures this imposes a strict requirement, and demands careful polishing of the unstructured master steel inserts. Although surfaces of this quality definitely are obtainable with present industrial fabrication methods, they also need to be characterized and validated, preferable with an easy in-process method. In this work, we compare three optical methods for characterizing nanoscale roughness: a laboratory scatterometer setup which measures the angle-resolved scattering (ARS) and bi-directional reflection distribution function (BRDF) of light scattered from a surface; a small industrial scatterometer called an OptoSurf, also measuring the ARS but only in a narrow range of ±16°; a confocal 3D optical profiler, which provide a 3D surface profile.  The roughness parameters evaluated are: the root-mean-square height (Rq), the root-mean-square slope (Rdq), both defined in the ISO 4287 standard, and the normalized variance of the scattered light distribution (Aq), defined in a German industry standard [1].  The OptoSurf fits into industrial production equipment, and has shown good results as quality control in the Nanoplast project [2]. Unfortunately it only measures the none-certified Aq value. In this work we present a relation between the OptoSurf Aq value and the more known Rq parameter. Based on the Aq value of the narrow range and the amount of light lost outside this range, the Aq value of the full range is determined, and further correlated with the Rq value. This enables a fast an easy characterization of surface roughness, with an industrial applicable tool.   Figure 1: a) Comparison of Aq values reveal good agreement between the ARS and OptoSurf setup, when both are constricted to the narrow range of ±16°. The full range values (±90°) show a consistently increasing trend, enabling the prediction of these values. b) Relation between the full range Aq and Rq values, showing that the ISO standardized Rq value can be determined from the lesser known Aq value.  References 1: Verband der Automobilindustrie. VDA 2009:2010-07 - Angle-resolved light scattering measurement. 2: www.nanoplast.dk a) b) 

Optical characterization of roughness on polished steel surfaces

http://orbit.dtu.dk/ws/files/124304892/Abstract_PRN_2015_2.pdf

Optical characterization of roughness on polished steel surfaces

Abstract

Similar works

Full text

Available Versions

Online Research Database In Technology