Characteristics and performance of several mass spectrometer residual gas analyzers

Abstract

The operation and properties of various mass-spectrometer residual gas analyzers for use in vacuum measurements were analyzed in terms of efficiencies of ion extraction, ion separation and transmission, and ion collection. Types of instruments studied were magnetic sector, omegatron, quadrupole, and monopole. Experimental results presented include absolute sensitivity to argon, relative sensitivity to 10 gases, and cracking patterns for these gases. It is shown that the properties are strongly dependent on instrument range, resolution, and the particular voltages, currents, or field intensities used to control the instrument