slides
Automated array assembly task, phase 1
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Abstract
Various aspects of a sensitivity analysis, in particular, the impact of variations in metal sheet resistivity, metal line width, diffused layer sheet resistance, junction depth, base layer lifetime, optical coating thickness and optical coating refractive index and on process reproducibility for A's diffusion from a polymer dopant source and on module fabrication were studied. Model calculations show that acceptable process windows exist for each of these parameters