Large area silicon sheet by EFG

Abstract

The development of a technique for the production of silicon ribbon is discussed. Extensive characterization of the multiple ribbon Furnace 3A main zone temperature profile was performed and the information used to improve uniformity of heating. Irregularities in the main zone heater were associated with growth difficulties at specific cartridge locations, and growth conditions subsequently improved by profiling the main zone heater. Good growth conditions were established in all three cartridge positions. These improvements allowed multiple growth of three 10 cm wide ribbons to be demonstrated for periods of an hour on several occasions. A gas distribution system for the 10 cm cartridge was introduced and demonstrated to lead to improved ambient control during growth. Growth without and with CO2 showed that quality improvement in 10 cm ribbon grown with cold shoes results from ambient manipulation