S-Band Shallow Bulk Acoustic Wave (SBAW) microwave source

Abstract

Techniques necessary to fabricate a high performance S-band microwave single source using state-of-the-art shallow bulk acoustic wave (SBAW) were explored. The bulk wave structures of the AlN/Al 2O3 were investigated for both the R plane and basal plane of sapphire. A 1.072 GHz SBAW delay line and oscillators were developed. A method of selecting and setting oscillator output frequency by selecting substrate orientation angle was also established