A basic, experimental study on the hydrochlorination of silicon tetrachloride and metallurgical grade silicon with hydrogen gas to form trichlorosilane was carried out to greatly expand the range of reaction conditions. The equilibrium constant, K sub p, for the hydrochlorination reaction was measured as a function of temperature, pressure and concentration. The variation of the equilibrium constant as a function of temperature provided the measurement on the heat of reaction, delta H, by the Second Law Method. The value of delta H was measured to give 10.6 Kcal/mole. The equilibrium constant was also studied as a function of concentration. In agreement with the theory,  the equilibrium constant remained constant with respect to the varying H2/SiCl4 feed ratios. On the other hand, the effect of pressure on the equilibrium constant was found to be more complex

Mui, J. Y. P.

English

NASA Technical Reports Server

Investigation of the hydrochlorination of SiCl4

The hyrochlorination of SiC14 and m.g. silicon metal to produce SiHC13, was investigated. Reaction kinetic measurements were carried out to collect additional rate data at 525 C and 550 C. A theoretical study was carried out to provide a kinetic model and a rate equation for the hydrochlorination reaction. Results of this preliminary study show that the rate of formation of SiHC13 follows a pseudo first order kinetics. The rate constants were measured at three temperatures, 550 C, 500 C and 450 C, respectively. The activation energy was determined from the Arrhenius plot to give a value of 13.2 Kcal/mole. The design of a quartz reactor to measure reaction rates and equilibrium conversion of SiHC13 at reaction temperature up to 650 C was completed

Reaction kinetic measurements on the hydrochlorination of SiCl4 and metallurgical grade (m.g.) silicon metal were made at a wide range of experimental variables. The effect of pressure on the reaction rate was studied at 25 psig, 100 psig, 150 psig and 200 psig, respectively. Results of these experiments show a large pressure effect on the hydrochlorination reaction. As expected, higher pressures produce a higher equilibrium SiHC13 conversion, since the hydrochlorination reaction results in a net volume contraction as product SiHC1 is formed. However, the reaction rate, namely, the rate at which the hydrochlorination reaction reaches its equilibrium SiHC13 conversion, was found to be much faster at low pressures

Investigation of the hydrochlorination of SiCL4

A research and development program on the hydrochlorination of silicon tetrachloride and metallurgical grade (m.g.) silicon metal to trichlorosilane was carried out as scheduled. Effects of pressure and temperature on this reaction are reported. The presence of HCl in the reaction product mixture was successfully analyzed. Approximately 0.1% to 0.5% HCl based on total chlorosilanes were produced by the hydrochlorination reaction. Experiments on the corrosion study were carried out to evaluate a variety of metals and alloys as the material of construction for the hydrochlorination reactor. Material includes carbon steel, nickel, copper, Alloy 400 (Monel), stainless steel (Type 304), Incoloy 800H and Hastelloy B-2. The corrosion test was carried out at reaction temperature of 500 C, pressure of 300 psig and H2/SiCl4 feed ratio of 2.0 for a total of 87 hours. Results of the corrosion test show that all the test samples achieved a weigh gain

Investigation of the hydrochlorination of SiCl4

Abstract

Similar works

Full text

Available Versions

NASA Technical Reports Server

NASA Technical Reports Server

NASA Technical Reports Server

NASA Technical Reports Server