Laser-assisted solar cell metallization processing

Abstract

The status of the laser-assisted solar cell metallization processing is described. Metallo-organic silver films were spun-on by argon ion laser beam pyrolysis. The metallo-organic decomposition (MOD) film was spun-on an evaporated Ti/Pd film to produce tood adhesion. In a maskless process, the argon ion laser writes the contact pattern. The film is then built up to obtain the required conductivity using conventional silverplating process. The Ti/Pd film in the field is chemically etched using the plated silver film as the mask. The width of the contact pattern is determined by the power of the laser. Widths as thin as 20 microns were obtained using 0.66 W of laser power. Cells fabricated with the 50 micron line widths of 4 ohm-cm floating zone (Fz) silicon-produced efficiencies of 16.6% (no passivation) which were equivalent to the best cells using conventional metallization/lithography and no passivation