The objectives of the Flat-plate Solar Array (FSA) Project Silicon Material Task are to evaluate technologies, new and old; to develop the most promising technologies; to establish practicality of the processes to meet production, energy use, and economic criteria; and to develop an information base on impurities in polysilicon and to determine their effects on solar cell performance. The approach involves determining process feasibility, setting milestones for the forced selection of the processes, and establishing the technical readiness of the integrated process

Lorenz, J. H.

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PLENARY SESSIONS N87 - 16 3 9 1  
SILICON MATERIAL TASK REVIEW 
CONSULTANT 
J. H. Lorenz 
Introduction 
1974/75 FLRT-PLRTE SOLRR RRRRY PROJECT WRS FUNDED 
IMPORTRNT FRRT OF THE RENEWRBLE ENERGY PLRN 
SILICON WRS SELECTED RS IT WRS THE ONLY FIELD TESTED 
PV MRTERIRL 
POLYSILICON, RS THE BRSE MRTERIFIL FOR SEMICONDUCTORS, WRS 
RVRILRBLE, SO RLL FSQ TRSKS COULD BEGIN WORK 
SEMICONDUCTOR POLYSILICON SOLD FOR 360 - 378 PER KILOGRRM 
WITH IMPURITIES IN THE PRRTS PER MILLION 
SOLRR CELLS COULD BE MRDE FROM "LESS PURE" SILICON 
PROBLEM WRS TO DEFINE THIS TERM RND 
DEVISE PROCESSES TO MRKE THE DESIRED SILICON 
GOQLS OF THE SILICON MRTERIRL TRSK WERE: 
TO ESTRBLISH SILICON MRTERIRL PROCESSES WITH R PURITY 
RDEQUQTE FOR THE PV CELL REGlUIREMENTS 
WITH R MQRKET PRICE OF $10 PER KILOGRRM (1975 3) 
( $19 IN 1985 $ ) 
SCQLRELE TO 1008 TONS/YERR PRODUCTION PLRNTS 
PRECEDING PA65 ELqF413 NOT FBLMW 
107 
https://ntrs.nasa.gov/search.jsp?R=19870006964 2020-03-20T12:14:28+00:00Z
PLENARY SESSIONS 
FSA Project: Silicon Material Task 
OBJECTIVES: 
TO EVRLURTE TECHNOLOGIES, NEW FIND OLD 
TO DEVELOP THE MOST PROMISING TECHNOLOGIES 
TO ESTRBLISH PRRCTICRLITY OF THE PROCESSES TO MEET 
PRODUCTION, ENERGY USE, RND ECONOMIC CRITERIR 
TO DEVELOP RN INFORMRTION ERSE ON IMPURITIES IN 
POLYSILICON RND TO DETERMINE THEIR EFFECTS ON 
SOLRR CELL PERFORMRNCE 
1. DETERMINE PROCESS FEFISIBILITY 
16 CONTRRCTS WERE ISSUED: TO INDUSTRY, UNIVERSITIES RND 
NON-PROFIT GROUPS TO WORK ON PROCESSES, IMPURITIES RND 
SF'ECIFICRTIONS -- ON R LRBORFITORY SCRLE 
2. MILESTONES WERE SET - FOR FORCED SELECTION OF THE PROCESSES 
TO FUND THE MOST PROMISING THROUGH PROCESS DEVELOPMENT 
TO DEMONSTRRTE PRRCTICRLITY OF THE PROCESSES 
TO MEET SCRLE-UP, ENERGY USE RND ECONOMIC CRITERIR 
3. ESTRBLISH TECHNICRL RERDINESS OF THE INTEGRRTED PROCESS 
THROUGH YERR LONG OPERRTION OF R PILOT PLANT -- 
TO OETRIN OPERRTINQ DFITR, OPTIMIZE DESIQN PRRRMETERS, 
CONFIRM PRODUCT PURITY 
PLENARY SESSIONS 
FSA Project: Silicon Material Task (Cont'd) 
4. FUND SUPPORT PROGRGMS FOR THE TRSK: 
ON HYDROCHLORONRTION OF SILICON 
(FIRST STRGE OF ucc PROCESS) 
DR. J. MU1 FIT MIT RND LRTER HIS OWN COMPRNY 
DRTR ON MRTERIRLS, CRTRLYSTS, RRTES 
ON RCRDEMIC STUDIES OF SILICON REROSOLS RND FLUIDIZED RED 
MODELS QT JPL, CRL TECH RND WRSHINGTON UNIVERSITY 
TECHNICRL CONSULTRNTS TO RID THE CONTRQCTORS RND JPL 
ON IMPURITY EFFECTS IN SILICON 
PLENARY SESSIONS 
Contractors for Process Development on Silicon 
R. FOR SEMICONDUCTOR GRFIDE SILICON 
HEMLBCK SEMICONDUCTOR CORP. 
J C SCHUMN2-lER CO. 
UNION CQRBIDE CORP. 
JET FIROFIULS I ON LRB. 
B. FOR SOLRR GRRDE SILICON 
GEROCHEM RESERRCH LRBS. 
BRTTELLE COLUMBUS LARS. 
DQW CORNING CORP. 
MOTOROLR INC. 
SRI INTERNRTIONRL INC 
TEXRS INSTRUMENTS INC. 
WESTINGHOUSE ELECTRIC CORP. 
DICHLOROSILRNE CVD 
BROMOSILRNE CVD/FB 
SILRNE PROCESS 
PYROLYZING SILRNE 
SILRNE/SILICON 
PLASMR JET 
Na/HGLIDE FLRME 
IMPQCTION REACTOR 
Zn/SIL TET 
DIRECT RRC FURNACE 
SiF2 TRRNSPORT 
Na/SIL TET 
CRRBOTHEMIC REDUCTION 
SiO2 
ROTQRY CHRMBER/TCS/FB 
PLRSMQ RRC HERTER PROCESS 
NA/SIL TET 
PLENARY SESSIONS 
United States Polysilicon Production Capacity 
(Metric Tons) 
1983 1984 1985 1986 1987 1988 1990 
1 .  Uniorl  C a r b i d e  
W a s h o u g a l  50 100 120 120 120 120 120 
Moses L a k e  - - 700 1200 1600 2400 2408 
2. H e m l o c k  (SEH, 
M i t s u b i s h i )  1000 1200 1200 1400 1400 1400 2000 
3. E t h y l  C a r p  1/86 945M H o u s t o n  500 1000 1008 
4. Morisanto 230 230 230 230 230 230 - 
5. Motorola 100 100 100 100 100 - - 
6. T e x a s  Ir i s .  350 350 350 350 - - - 
7.  N i p p o n  Kokan 140 200 200 200 200 200 - 
1. Great L a k e s  - 
2. S c h u m a c h e r  
O c e a n s i d e  - 
3. B u n n i n g t o n  
R o c h e s t e r  
PILOT PLRNTS 
- - 20 
- - 
PLRNN I  N g  
1. Fllcan, C a n a d a  
2 .  P a s a d e n a  Group 
3. RLCOQ 
PLENARY SESSIONS 
Accompiishmen"c for the Project 
e RESULTED IN THE DEVELOPMENT RND COMMERCIRLIZRTION OF 64 
NBVEL PROCESS FOR MRKING SILRNE BND HIGH QURLITY 
SEMICONDUCTOR GRRDE POLYCRYSTRLLINE SILICON 
--THE UNION CRRBIDE SILRNE TO SILICON PROCESS 
o RTTRQCTED WORLD WIDE RTTENTION TO THE JPL/DOE PROJECT--DUE 
TO THE QURLITY OF THE PROCESSES IN THE TRSK 
a UCC PROCESS RECEIVED 12 NRSQ SPECIRL RECOGNITION RWRRDS 
CHIEF DESIGN ENGINEER (BILL BRENEMRN) WRS HONORED WITH 
1985 PIONEER QWRRD OF THE RMERICRN INSTITUTE OF CHEMISTS 
o SILRNE PRRT OF THE UCC PROCESS WRS COMPLETED THROUGH THE 
FERSIBILITY VERIFICRTION IN R 100 TON PER YERR PILOT PLQNT 
cl FISSURED RDEQURTE CRPQCITY. IN THE U. S. FOR-~ PURE SILRNE 
FOR THE DOE/SERI RMORPHOUS SILICON R &D PROGRRM RND FOR 
FUTURE PRODUCTION 
o PROVIDED R TECHNOLOGY BRSE FOR POSSIBLE DEPOSITION 
PROCESSES -- EVEN THOUGH THE GORL OF $10/KG SILICON WRS 
NOT RERLIZED: UCC & JPL ON FLUIDIZED BEDS; 
CRL TECH ON FREE-SPRCE DEPOSITION PQRTICLE GROWTH 
o MRDE THE DIRECTORS OF UCC TQKE NOTICE -- RESULTING IN THE 
COMMERCIQLIZRTION WITH Q 1200 TON PER YEQR PLRNT 
PLENARY SESSIONS 
Accompiishments for the Project (Cont'd) 
u CONFIRMED, WITH HEMLOCK'S WORK, THRT DICHLOROSILRNE HRS 
SOME RDVRNTRGES OVER TCS DEPOSITION 
a DEFINED THE EFFECTS OF IMPURITIES IN SILICON ON SOLRR 
CELL PERFORMRNCE (WESTINGHOUSE QND MONSRNTO) 
o PRESENTED THE RELRTIVE ECONOMICS OF THE POTENTIRLS OF THE 
SILICON PROCESSES, INCLUDING COMPRRISON WITH THE TCS/CVD 
SEMICONDUCTOR PROCESS 
PLENARY SESSIONS 
Accomplishments for Electronics in General 
o HELPED PUT THE U. S. IN POSITION FOR FI LERDERSHIP ROLE IN 
POLYSILICON CRPRCITIES TONS PER YERR 
UNITED STRTES WORLD 
1976 950 1004 
Q CRTRLYZED THE INTEREST OF COMPRNIES TO GET INTO SILICON 
- SCHUMRCHER HRS R 40 TON PILOT PLRNT 
- ETHYL CORP. HFIS RNNOUNCED R PILOT PLFlNT BRSED ON SILRNE 
- FOUR OTHER COMPRNIES IN U S RRE CONSIDERING POLYSILICON 
o CONFIRMED HIGH PRESSURE, HIGH TEMPERRTURE CHEMICRL 
RERCTIONS COULD BE ENGINEERED 
o DETRILED IN THE HEMLOCK CONTRRCT R POSSIBLE IMPROVEMENT OF 
THE TCS/CVD PROCESS -- BY USING DICHLOROSILQNE QND THE 
RECYCLING OF THE SIL TET (IST STEP IN UCC PROCESS) 
a UCC PROCESS HRS THE POTENTIRL TO PROVIDE THE MOST PURE 
POLYSILICON FOR PV OR SEMICONDUCTOR USE 
o PROVIDED R PURE SOURCE OF SILRNE FOR RLL USES RND RSSURED 
THE U. S. R LERDERSHIP ROLE IN SILRNE 
a SPURRED CURRENT SILRNE SUPPLIERS TO IMPROVE THEIR 
RURLITY FOR BOTH PV RND SEMICONDUCTQR USE 
PLENARY SESSIONS 
Yet t o  be Done 
R. TO MEE"PHE QORL 
(GOVERNMENT FUNDING WILL BE NEEDED F O R  THIS WORK) 
FSQ PROJECT DID NOT RCHIEVE ITS GOQL -- NOR DID THE 
MRTERIRLS TQSK 
TO QCHIEVE THE LOW COST SILICON, R LOW COST DEPOSITION 
PROCESS MUST BE FULLY DEVELOPED -- THE FLUIDIZED BED 
TECHNIQUE LOOKS PROMISING, BUT NEEDS ENGINEERING WORK ON 
MRTERIRL OF CONSTRUCTION, OPTIMUM CONDITIONS FOR GROWTH RND 
DETERMINRTION OF PRODUCT PURITY 
THE FREE SPRCE RERCTOR DEPOSITION COULD BE LOWEST COST, 
IF THE PRRTICLES COULD BE GROWN TO R LRRGER SIZE. 
B. TO EXPRND THE USE OF THE TECHNOLOGIES 
(INDUSTRY WILL DO THIS WORK) 
OTHER COMPRNIES HRVE OR RRE LOOKING RT THE TECHNOLOGY 
IN THE FIELD OF ELECTRONICS 
RVRILRBILITY OF PURE SILRNE IN LRRGE VOLUMES WILL 
ENCOURRGE INVESTIGRTION OF OTHER USES 
INTEGRRTION OF PQRTS OF THESE PROCESSES INTO THE 
ELECTRONICS QRER HYDROGENRTION, DICHLOROSILRNE 
PLENARY SESSIONS 
Conclusions 
o PRRT OF THE OBJECTIVES OF THE MRTERIRL TQSK WERE QCHIEVED 
o TECHNOLOGY DRTR BRSES WERE ESTRBLISHED FOR THE UNFINISHED 
DEPOSITION WORK 
o THE U S HRS ENHRNCED THEIR LERDERSHIP IN POLYCRYSTRLLINE 
SILICON 
o TECHNOLOGY OF VRLUE TO THE WORLD-WIDE ELECTRONICS 
INDUSTRY HRS BEEN ESTRBLISHED RND PUBLISHED 
o THE MQTERIRL TRSK IS R PRIME EXRMPLE OF THE PROPER USE 
OF GOVERNMENT FUNDING OF HIGH COST, HIGH RISK RESERRCH RND 
DEVELOPMENT 


Silicon material task review

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