Introduction to total- and partial-pressure measurements in vacuum systems

Abstract

An introduction to the fundamentals of total and partial pressure measurement in the vacuum regime (760 x 10 to the -16th power Torr) is presented. The instrument most often used in scientific fields requiring vacuum measurement are discussed with special emphasis on ionization type gauges and quadrupole mass spectrometers. Some attention is also given to potential errors in measurement as well as calibration techniques