The Office of Commercial Programs (OCP), working in conjunction with NASA engineers at the Goddard Space Flight Center, is supporting research efforts in robot technology and microelectronics materials processing that will provide many spinoffs for science and industry. The Telerobotic Materials Processing Experiment (TRMPX) is a Shuttle-launched materials processing test payload using a Get Away Special can. The objectives of the project are to define, develop, and demonstrate an automated materials processing capability under realistic flight conditions. TRMPX will provide the capability to test the production processes that are dependent on microgravity. The processes proposed for testing include the annealing of amorphous silicon to increase grain size for more efficient solar cells, thin film deposition to demonstrate the potential of fabricating solar cells in orbit, and the annealing of radiation damaged solar cells

Ollendorf, Stanford

English

NASA Technical Reports Server

N91-23061 .
TELEROBOTIC ELECTRONIC MATERIALS PROCESSING EXPERIMENT
Stanford Ollendorf
Chief, Office of Telerobotic Engineering
NASA Goddard Space Flight Center
BACKGROUND
The NASA GSFC Office of Commercial Programs (OCP) is currently sponsoring industry and institutional
research programs that will utilize GSFC developed robot technologies to facilitate space-based production
of mieroelectronic materials (semiconductors) and devices. The microgravity space environment offers
many advantages for microelectronic processing. In the absence of gravity, thermal convection, buoyancy
and sedimentation are eliminated. Microgravity also enables containerless material processing, thereby
reducing the likelihood of semiconductor contamination. A high vacuum controlled atmosphere, cleanliness
and isolation of hazardous materials are other space processing advantages. The objective of the OCP and
NASA Headquarters Space Commercialization Office, Code C, is to provide a broad program of
technological research and development in support of space-based microelectronic materials processing
applications and science programs by matching GSFC capabilities to industry and institutional needs.
Robotics for Commercial Microelectronics Processes in S_ce Workshop_
The GSFC OCP hosted the "Robotics for Commercial Microelectronics Processes in Space Workshop" in
December 1987. This was the beginning of a four Phase approach that will lead to a test payload for a
space-based processing facility. The objective of the Phase I workshop was to bring together NASA,
university, and industry researchers, as well as Space Shuttle carrier personnel, to discuss materials
processing, robotics, and commercial automation. Discussed in the workshop was the utilization of
robotics and automation to improve microelectronic processing productivity. Phase II of the program was
initiated to investigate processes that included bulk crystal growth, wafer manufacturing and device
fabrication. A "Telerobotics for Commercial Microeleclronics Processes in Space" study report concluded
that the utilization of automation and telerobotic technologies was far more cost effective and less hazardous
than using a human operator. [Ref. 1]
It has been proposed that Phase III utilize the unique NASA GSFC Development, Integration and Test
Facility (D1TFAC) testbeds, shown in Figure 1, to identify key features for the material processes and
demonstrate robot and automation capabilities. The DITFAC currently supporting the Hight Telerobotic
Servicer flaTS) program incorporates three primary testbeds. These testbeds are being used by the GSFC
robotics team to create, test and evaluate new and evolving robotic technologies. The testbeds include the
FTS Functional Simulator, Engineering Testbed and the Graphics Simulator. These testbeds are being used
to evaluate Space Station Freedom mockups, perform robot simulations, research issues such as robot
control algorithms and perform graphic kinematic simulations of various robot tasks. [Ref. 2]
The Phase IV proposal represents the development of a Telerobotic Materials Processing Facility
(TRMPX). TRMPX is a Shuttle-launched, materials processing test payload using a Get Away Special
(GAS) can. The test payload is necessary because key features of the facility cannot be fully tested on earth
and will require exposure to the unique environment of space. [Ref. 3]
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ORIGINAL PAGE IS
OF POO QUALITY
k
MOCKUI_
GANTRY ROBOT
Figure 1. Development, Integration and Test Facility (DITFAC)
TELEROBOTIC MATERIALS PROCESSING EXPERIMENT (TRMPX)
The objectives of the GSFC managed and OCP sponsored TRMPX program are to define, develop and
demonstrate an automated materials processing capability under realistic flight conditions. GSFC has
proposed to accomplish this using small test payloads launched on the Shuttle as a Hitchhiker attached
GAS payload experiment. TRMPX will fit inside the 19-3/4" diameter x 28-1/4" length GAS can interior.
The Hitchhiker avionics and electronics interface will provide the necessary power and dam handling to
operate TRMPX. The process of utilizing the GSFC laboratory to develop and demonstrate robot
capabilities, and the knowledge accrued from this experiment, reduce the risk in developing a space-based
materials processing facility. A concept drawing of a proposed TRMPX is shown in Figure 2. [Ref. 4]
AII_UIIIIL V T_
JOTA'III_i Iq._ll
Figure 2. Telerobotic Materials Processing Experiment (TRMPX) Concept
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Materials Processing Ex_riment
TRMPX will provide the capability to test the production processes that are dependent on microgravity.
The processes proposed for testing include:
• the annealing of amorphous silicon to increase grain size for more efficient solar cells,
• thin film deposition to demonstrate the potential of fabricating solar cells in orbit, and
• the annealing of radiation damaged solar cells.
Robot Handling Equit_nent
TRMPX robot-lxocess testing will include:
• three axis robot manipulation,
• the gripper/grasping and robot manipulation of palette with sample materials, and
• robot control using autonomy as well as teleoperation from the ground.
Mission Characteristics
The proposed materials processing mission for the initial TRMPX is the post fabrication recrystallization
annealing of poly and amorphous Silicon (Si) to increase microcrystal grain size for the production of high
efficiency solar cells based on inexpensive materials.
Figure 3 shows the effects on grain size for metal crystals grown in a centrifuge. It is theorized from this
data that one can approach a single crystal configuration and therefore improve solar cell efficiency by
processing in a microgravity environment.
TOWARD
O-G SINGLE
CRYSTAL
lg 1-3/4 g 3-1/2g 5g
GRAIN VS. G-FORCE
Figure 3. Micro Gravity Effects ORIGINAL PAGE IS
OF POOR QUALITY
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Therobotinteractionwouldinclude:
• substrateexchange from holding carriages to annealing area and back again,
• in-flight analysis and robot control to adjust the annealing cycles during the course of the
experiment.
Robot tasks will further evolve as the experiment design is solidified.
The clef'tuition of TRMPX mission and robot design requirements will be completed during the second
quarter of FY 91. A prototype Flight TRMPX will be available during the third quarter of FY 92 with a
launch by the first quarter FY 93. These time lines assume continued funding support and STS
availability.
Centers for Commercial Development of Space - CCDS
The TRMPX program utilizes in-house engineering support as well as conwactors. Commercial Centers
for Development in Space (CCDS) was established to provide for commercial involvement in requirements
def'mition. The CCDS consists of universities and industry which conduct research and development of
technologies with applicability to space-based materials processing. Clarkson College and Batelle
Corporation are researching materials such as zeolite ampoules. They also plan to flight test GSFC silicon
samples on-board a KC-135 aircraft. Hying at a high altitude, a free falling KC-135 can duplicate a
weightless environment for short durations. Similar samples may be supplied to GSFC for the TRMPX
experiment. The University of Wisconsin Center for Space Automation and Robotics (WCSAR) has been
established to conceive, demonstrate and simulate space and terrestrial commercialization technology. The
WCSAR has been involved in robot automation and sensor development and is considering joining the
TRMPX team.
TELEROBOTICS MATERIALS PROCESSING FACILITY (TRMPF)
Qoals and Ob_iectives
GSFC engineers have begun to define requirements and concepts for a free-flyer telerobotic materials
processing facility (TRMPF). The objective of the TRMPF program is to evolve TRMPX to a fully self
contained free flyer materials processing facility. TRMPF will utilize enhanced materials processing and
robotic capabilities used on TRMPX.
Mission Scenario
The TRMPF facility, shown in Figure 4, will be approximately 30" diameter and 76" long. Initially,
TRMPF would be an attached payload on the Shuttle evolving to a permanent facility on Space Station
Freedom or a free flying spacecraft. The geometry and size of TRMPF make it a good candidate for launch
on an expendable launch vehicle (ELV). The facility can be serviced by the Shuttle or an ELV with re-entry
capability. Both would supply new materials for processing and remove processed samples and return to
earth as shown in Figure 5. Another concept being considered is to launch multiple facilities that would be
attached to each other by using an autonomous robot walker to form a TRMPF train as shown in Figure 6.
Facilities that have completed their missions will be detached and returned to earth.
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PROCESSED MATERIALS
PROCESSORS
MEASUREk_NT
CONTAINER
RADIAL ROBOT ARM
FREE FLYING TRN:F
RE-ENTRY CONE WITH PROCESSED
SAMPLES PEGASUS LAUNCHED SERVICER
Figure 4. TRMPF Concept
\ <ID
\
Figure 5. TRMPF Servicing
326
TIRMPF TRNN COIdPFIISlNO IkC
ELV TOP STAGE /NEW MOOULE
:::::::::::::::::::::::::::::/
_1 t _ H-PLA11[ ROIIOT
_1_ OAIPPER
INTERFACE
ONE FLANGE ON TOP STAGE CAN
BE EXTENOIEB FOIl A_il'ACHMr_T TO
?-OOF WN.KEll ROIOT 1MTI,i
1.OO!: ELiIOW ANO IDENTICAL
I-DOF WRIST ANO ORIPPlER WITH
I_Wli It* DATA OONliO71ON AT
EACH ImO
NOTE: ATTACHMENT OF _ LE TO
ELY TOP ITAOE 18 IMIE
AS MOOULE-TO41OOUUi
ATTACHMENT
Figure 6. TRMPF Train
SUMMARY AND CONCLUSIONS
The OfficeofCommercialPrograms(OCP) workinginconjunctionwithNASA GSFC engineersis
supporting research efforts in robot technology and microclcctronics materials processing that will provide
many spinoffs for science and industry. The environment of spac_ provides a number of potentially
significant advantages in regard to commercial microelectronie lm3cesses. To provide for an environment by
which these emerging technologies can be tested and demonstrated, GSFC has developed and implemented a
Development, Integration and Test Facility. The OCP is sponsoring universities and industry to participate
in this tremendous opportunity to contribute to the development of mieroeleclronie processing and robotic
applications in space.
TRMPX is being designed as an attached Shuttle payload to demonstrate an automated materials processing
capability under realistic flight conditions. TRMPF will evolve using the knowledge gained from TRMPX
to form a stand-alone self-supporting free-flyer materials processing facility in space.
REFERENCES:
o
2.
3.
"Telerobotics for Commercial Microelectronics Processes in Space." NASA GSFC, 1987.
Ollendorf, S.: "Robotics Program at NASA Goddard Space Flight Center." NASA GSFC, 1989.
"Telerobotic Electronic MaterialsProcessing Experiment GREMPX)." Systems Concept Review.
NASA GSFC, December 21, 1989.
, "Get Away Special (GAS) Small Self Contained Payloads - Experimenter Handbook." NASA
GSFC, 1989.
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