Abstract

A new method of probing mechanical losses and comparing the corresponding deposition processes of metallic and dielectric coatings in 1-100 MHz frequency range and cryogenic temperatures is presented. The method is based on the use of extremely high-quality quartz acoustic cavities whose internal losses are orders of magnitude lower than any available coatings nowadays. The approach is demonstrated for Chromium, Chromium/Gold and a multilayer tantala/silica coatings. The Ta2O5/SiO2{\rm Ta}_2{\rm O}_5/{\rm Si}{\rm O}_2 coating has been found to exhibit a loss angle lower than 1.6×1051.6\times10^{-5} near 30 {\rm MHz} at 4 {\rm K}. The results are compared to the previous measurements

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