Carboxylated multi-wall carbon-nanotubes (CNTs) monolayers are integrated on microfabricated all-polymer micro-electromechanical systems (pMEMS) resonator bridges on glass substrates. The structural layer of the MEMS bridges is a multilayer blended conductive polymer based on
poly(3,4-ethylenedioxythiophene):poly (styrenesulfonate) (PEDOT:PSS) to which functionalized CNT monolayers are electrostatically attached. The resonance frequency (fres) of electrostatically
actuated pMEMS bridges was measured as a function of their length (32–67 lm) for different multilayer compositions. A significant increase in fres and quality factor (Q) with the addition of CNT monolayers to the PEDOT:PSS structural material is observed, demonstrating that CNT
monolayers can be used to modulate pMEMS resonator properties.Peer ReviewedPostprint (published version
