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單晶片式無機駐極體電容麥克風及其製造方法
Authors
RAY HUA HORNG
張昭智
+3 more
武東星
洪瑞華
黃信熏
Publication date
6 June 2014
Publisher
材料科學與工程學系
Abstract
本發明提供一種單晶片式無機駐極體電容麥克風及其製造方法。該單晶片式無機駐極體電容麥克風包含一機殼及一封裝於機殼中之駐極體電容麥克風晶片。該駐極體電容麥克風晶片一電極層、一自該第一電極層向下形成之駐極體振動膜、一自該駐極體振動膜向下形成且界定出一空間的氣室層,及一自該氣室層向下形成的背氣室單元,該氣室層包括以一蒸鍍層及一自該蒸鍍層向下形成的增厚層共同形成之一外環壁及多數被該外環壁環限的音孔塊,該電極層與該蒸鍍層藉該駐極體振動膜之一無機駐極體材料層構成一駐極體式電容,當一聲能作用於該電極層後,該駐極體振動膜對應產生形變而使電容變化,同時該駐極體振動膜形變引起之氣流可藉該外環壁與該等音孔塊彼此間的間隙在該氣室層之空間與機殼中流動
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Last time updated on 16/06/2016