The hybrid ZnO/Sapphire material is selected to exploit the collective benefits of Zinc Oxide (ZnO) and sapphire for the development of a high performance Surface Acoustic Wave (SAW) device. The microfluidic applications of ZnO/Sapphire layered surface acoustic wave devices are discussed. In addition, acoustic streaming in droplets is investigated using a custom-made ZnO/Sapphire layered device. Experimental results show that a maximum acoustic streaming of ~600 µm/s is achieved when the device is operated at 158 MHz

Alameh, Kamal

Friend, J. R.

Kandasamy, S

Maurya, Devendra

Tjeung, R T

English

Research Online @ ECU

Edith Cowan University Research Online ECU Publications 2012 1-1-2012 Droplet manipulation using ZnO/sapphire based saw devices Kandasamy Devendra Maurya Edith Cowan University R T Tjeung J. R. Friend Kamal Alameh Edith Cowan University Follow this and additional works at: https://ro.ecu.edu.au/ecuworks2012  Part of the Engineering Commons Kandasamy, S., Maurya, D. , Tjeung, R., Friend, J., & Alameh, K. (2012). Droplet manipulation using ZnO/sapphire based saw devices. Proceedings of International Symposium on Macro- and Supramolecular Architecture and Materials MAM-2012. (pp. 25-28). Coimbatore, India. Bloomsbury Publishing India Pvt. Ltd. This Conference Proceeding is posted at Research Online. https://ro.ecu.edu.au/ecuworks2012/136 DROPLET MANIPULATION USING ZnO/SAPPIDRE BASED SAW DEVICES S. KANDASAMY, 1•2 D.K. MAURY A/ R.T. TJEUNG,4 J.R. FRTEND1'5 AND K. ALAMEH3 11\le/boume Centre for Nauofabrication, 151 Wellington Rd, Clayton, VIC 3168, Australia 'School of Physics, University ofMelboume, Parkville, VIC 30!0, Australia 3 Electron Science Research Institute, Edith Cowan Uuil'ersity, Joondalup, WA 6027, Australia 4Dept. q(1\1echauical and Aerospace Engineering, 1\lonash University, Clayton, VIC 3168, Australia 5School of Electrical and Computer Eng., liMIT University, Melboume, VIC 3004, Australia E'-mail: dmaurya@ecu.edu.au ABSTRACT The hybrid ZnO!Sapphire material is selected to exploit the collective benefits of Zinc Oxide (ZnO) and sapphire for the development of a high performance Surface Acoustic Wave (SAW) device. The microf/uidic applications of ZnO/Sapphire layered surface acoustic wave devices are discussed. In addition, acoustic streaming in droplets is investigated using a custom·made ZnO/Sapphire layered device. Experimental results show that a maximum acoustic streaming of -600 Jlm/s is achieved when the device is operated at 158 MHz. INTRODUCTION There has recently been an increasing interest in developing high frequency surface acoustic wave (SAW) by depositing a piezoelectric thin film on a high acoustic velocity substrate.[ I ,2] SAW technology offers simpler and more compact devices without involving moving parts. The interaction of fluid with acoustic energy arising from SAW can be exploited for fluid manipulation at micro to nano scale. ZnO is a multifunctional material for several applications because of its structural} optical and electrical properties.[3,4] Piezoelectric ZnO materials possess high electromechanical V. Rajcndran, R. Yuvakkumar, K. Thyagarajah and K.E. Geckeler (eds.) Applications ofNmw Materials: Electronics, Energy and Environme11f, pp. 25-28. (2012). ©Bloomsbury Publishing India Pvt. Ltd. 26 S. Kandasamy, O.K. Maurya, R. T. Tjeung, J.R. Friend and K. A/amah coupling coefficients, which make them attractive for realizing thin films SAW devices. In contrast, sapphire (A!,03) substrates are widely used for their high acoustic velocity ((-I 0,000 m/s) and relatively low loss.[S] The high acoustic velocity of sapphire eliminates the need for sub-micron IDT patterning. The potential approach of developing a hybrid ZnO/Sapphire [6-8] SAW device is desirable as it enables the fabrication of microfluidic devices for various applications, such as biomedical and environmental sensing. Various conventional deposition techniques, such as sol-gel, pulsed laser deposition (PLD), molecular beam epitaxy (MBE), metal organic chemical vapour deposition (MOCVD) and sputtering have been used to prepare ZnO thin films. Each deposition method has advantages, depending on the specific application that it is used for. Sputtering, however, is currently the most conunonly used deposition technique for the preparation of polycrystalline ZnO, which is the most favored material for acoustic applications. Sputtering offers several advantages, such as deposition at low substrate temperatures and high sputtering rates, the fabrication of thin films with a uniform surface and excellent crystallinity. In this paper, we investigate acoustic sn·eaming in droplets placed on a ZnO/Sapphire layered device. Experimental results show that a maximum acoustic streaming of ~600 JUn/s can be attained when the device is driven by a 158 MHz sine wave. EXPERIMENTAL In this study, a ZnO thin film was deposited on a sapphire substrate using a radio-frequency magnetron sputtering system. A 99.99% pure, 3-inch diameter ZnO target was used to sputter ZnO onto a sapphire subsn·ate. The sputtering power was I 50\V and the deposition process parameters are listed in Table 1. Post-annealing treatments were sequentially carried out at 500°C for 5 Ius in ambient air to eliminate the intrinsic stress induced by sputtering and also to provide sufficient energy to ensure that ZnO molecules are crystallized. The ZnO film thickness was measured using a smface profilometer, and X-ray diffraction was used to analyze the crystallographic strucb1re of the ZnO film. After the required film quality has been evaluated, SAW devices were fabricated on the ZnO thin films. Inter Digital Transducer (!DT) patterns were transferred on to the ZnO surface by conventional lift-off process. The !DT consists of an adhesion layer of I 0 nm Cr and 200 nm of Au, which were thermally evaporated. The !DT was designed to have 60 numbers of finger-pair with• 8 fUll dimension for both the width and the spacing, which corresponds to a wavelength of 32 fUll. Table 1: ZnO Deposition Parnmeters Target ZnO Process gas 60% Ar + 40%02 Substrate temperature 150'C RF power 150\V Process pressure 10 mTorr Droplet Manipulation Using ZnO!Sapphlre Based SAW Devices 27 RESULTS AND DISCUSSION The XRD data plotted in Figure l show the high 29 intensity at 34.4", which represents a (002) diffi·action peak, indicating that the ZnO deposited on sapphire is c-axis oriented. The deposited ZnO film was required to be c-axis oriented, due to its high electromechanical coupling coefficient. Several SAW devices were made with Cr/ Au fingers for A.~ 32 fUll. All ZnO films had a thickness (h) of l fUll (Ill).~ 0.03). The measured centre frequency and the calculated phase velocity were 161 MHz and 5152 nlis, respectively. The fabricated SAW devices were utilized to .induce acoustic streaming in a sessile droplet. Figure 2 shows the successive images of the SAW streaming inside a l ftL water droplet seeded with 4.8 1nn fluorescent particles. The JDT is located to the right of the droplet. The particles are concentrated in the two vortices within 4 seconds ofJDT activations. The streaming speed with respect to increasing input'power is shown in Figure 3. t-~ 5 .f:· • ] 5000 -1~00 4000 .\~00 JOOO 1500 1000 '"" 1000 500 0 lO JO ~Mn?i'I!N at ~OOT in ~ir ,. 10 60 70 Fig. 1: XRD Spectra ol Sputtered ZnO FUm on Sapphire Substrate Fig. 2: Successive Images of the SAW streaming Inside a 1 !JL water droplet seeded with 4.8 11m fluorescent particles. The IDT Is located to the right of the droplet. The particles are concentrated In the two vortices within 4 seconds of IDT activations. 701) 1 I un +--"'1------------;A-' ----,' ' .. ,~; ----- ------~" .. :11---$t<oi:~1.ip"d ' .. " .. '" -~ ----- .. ~?~-=- ~ .. UG f-----JI_. ""- ?'""'~'---' 't-:-/ 1~111- ,.. :1~ -------0:-- _z~-- ~ 0 ~mlu<.fi!<f -11- !mluot!tr - 1.- !mk10~1" Fig. 3: Acoustic Streaming Speed ol the Water Droplet Versus Input Power (RF frequency of 158 MHz) 28 S. Kandasamy, O.K. Mawya, R. T. Tjeung, J.R. Friend and K. Afameh Three different volumes of water droplets were used in the experiments, and a maximum streaming speed of 600 fUnis was observed. Acoustic streaming was a steady fluid motion that resulted from the propagation of acoustic waves through a dissipative fluid medium. As the acoustic waves attenuated in the fluid medium, it generated a gradient in the momentum flux. This induced a Reynolds stress, causing the steady fluid velocity. CONCLUSION Acoustic streaming in micro droplets has been investigated using a ZnO/Sapphire based layered device. Acoustic streaming has been observed in the form of two vortices. Results have shown that micro particles can concentrate in the form of vortices within 4 seconds of IDTs activations. A maximum acoustic streaming of ..... 600 ~un/s has been measured when the device was operated at 158 MHz. These results have application in biomedical and environmental sensing. ACKNOWLEDGEMENT This work was supported by DPMC, ARC, NHMRC, Edith Cowan University and the Depm1ment of Industry, Innovation, Science, Research and Tertimy Education, Australia. REFERENCES fl] Kim, Y.-J. and Kim, K.:-\V., Chriractel'istics of Epitaxial ZnO Films on Sapphire Substrates Deposited using RF-Magnetron Sputtering, Jpn. J. Appl. Phy., vol. 36, pp. 2277-2280, 1997. [2] Kadota, M. and Minakata, M., Piezoelectric Properties . of ZnO Films on a Sapphire Substrate Deposited by an RF-Magnetron-Mode ECR Sputtering System, Jpn. J. Appl. Phy., vol. 37, pp. 2923-2926, 1998. [3] Winey, J. M., Gupta Y. M. and Hare, D.E., r-axis sound speed and elastic prope11ies of sapphire single crystals. J. App. Phy., Vol. 90, p. 3109, 2001. [4] Emanetoglu, N.W., Gorin, C., Liu, Y., Liang, S. and Lu, Y., Epitaxial ZnO piezoelectric thin Film for SA \V Filters, Material Science in Semiconductor Processing, vol. 2, pp. 247-252, 1999, [5] Emanctoglu, N,\V,, Patounakis, G., Liang, S., Gorin, C., \Vittstruck, R. and Lu, Y., Analysis of SA \V Properties of Epitaxial ZnO Films Grmvn on R-Al203 Substrates, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 48, pp. 1389-1394,2001. [6] Emanetoglu, N,\V., Liang, S., Gorin, C. and Lu, Y., Epitaxial Growth and Characterization of High Quality ZnO Film for Surface Acoustic Wave Applications, IEEE Ultrasonics Symposium, 1997. [7] Mitsuyu, T., Ono, S. and \Vasa, K., Stmctures and SA \V prope11ies of rf sputtered single-Ct)'Stal films ofZnO on sapphire, Journal of Applied Physics., Vol. 51, pp. 2464-2470, 1980. [8] \Vu, T-T. and \Vang, \V.-S., An Experimental Study on the ZnO/Sapphire layered surface acoustic wave device, J. 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Droplet manipulation using ZnO/sapphire based saw devices

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Droplet manipulation using ZnO/sapphire based saw devices

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