Structural Analysis of ZrS Films

Abstract

用热蒸发法和磁控离子射频溅射法制备了znS薄膜,利用X射线衍射技术对所研制的薄膜的结构相特性进行研究,为研制高效的光电材料提供依据.ZnS Thin Films are developed by directed thermal evaporation method and FM sputting method, and XRD technology is used to research the structure phase characteristic of the thin Films