整合光纤通信的低损耗宽频带大容量低成本的优势与Si基质材料的成熟工艺技术和低廉制作成本优势，研制Si衬底Ge量子点光纤通信用光电探测器，将为超大规模光电集成通信及未来光子通信做好准备，造福人类。 本论文在超高真空化学气相沉积（UHV/CVD）生长设备上，采用自组装S-K（Stranski-Krastanov）先层后岛生长方法，系统的研究了单层Ge量子点生长条件，得到了单层Ge量子点生长的最优条件：温度T=550℃；时间t=5min；GeH4流量=1sccm。进而优化设计多层结构生长条件，成功的在Si基上制备了PIN结构多层Ge量子点探测器材料。采用传统的Si半导体工艺，通过3次（版）光刻，摸...The advantages of fiber communication system is huge-capacity, low-cost, broad-band and low-loss ，also the Si-based semiconductor devices have the advantages of mature production technology and low production costs. How to integrate the advantages of both? Developing Si-base Ge Quantum-Dots photodetector used in fiber communication field is the right way. It will prepare for ultra-large-scale opt...学位：工程硕士院系专业：物理与机电工程学院机电工程系_仪器仪表工程学号：X200518201
