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Synthesis, Characterization and Application of Large Area CVD Graphene

Abstract

石墨烯及其相关材料因为其优异的物理、化学性质在高速计算芯片、复合材料、平板显示、储能元件等方面有着广泛的应用前景。不同于传统材料,人们对这种具有蜂窝结构的二维晶体还知之甚少;其生长、表征还是世界性的研究热点和难点;其应用方面的研究也有待深入拓展。本论文围绕石墨烯生长、表征以及应用三大方面内容,结合化学气相沉积技术、微区Raman光谱技术、光学电学性能测试技术,着重从单层、多层石墨烯化学气相沉积制备、热输运性质表征、石墨烯抗氧化性以及石墨烯场效应晶体管应用等方面开展了全面的研究,主要取得如下研究成果: 石墨烯生长方面,采用目前最先进的化学气相沉积制备技术,在Cu表面实现晶粒尺寸可控的石墨烯生长...Graphene is a promising advanced material for broad applications in integrated circuits, radio frequency transistor, composite materials, transparent conducting electrodes and energy storage. Although graphene, particularly the electron transport property in graphene, has been widely studied, synthesis, thermal property and application are still challenging. To cover these critical issues, this th...学位:工学博士院系专业:物理与机电工程学院物理学系_微电子学与固体电子学学号:1982007015390

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