本文对金刚石和类金刚石（DLC）薄膜的半导体特性参数和光电性质进行评述。采用射频等离子体增强型化学气相沉积方法生长各种DLC薄膜，在对所生长的DLC薄膜结构表征的基础上，详细研究了其光电性质。研制了以DLC薄膜为有源层的MSM光电探测器，并对其I-V特性、光谱响应、C-V特性进行详细测量和分析。最后总结本文的工作，并对将来的工作提出建议，同时展望了DLC薄膜在光电方面的应用前景。在深圳纳诺材料技术研究所的大力帮助下，成功生长了不同光学带隙的各种DLC薄膜。采用AES、Raman谱、XPS和FT-IR谱等方法对所生长的DLC薄膜进行结构表征，发现改变射频电压等工艺条件可以有效控制DLC薄膜中sp...The semi-conductor characteristic parameters and optoelectronic properties of diamond and diamond-like carbon (DLC) were expounded in this work. Series of DLC thin films were grown by RF-PECVD, and the optoelectronic properties of DLC thin films were investigated based on the characterization. DLC based MSM photoelectron detectors were then successfully fabricated and their characteristics of devi...学位：理学博士院系专业：物理与机电工程学院物理学系_凝聚态物理学号：B20012401
