先进光学元件包括高精度平面和非球面元件，在国防及民用高技术领域都有着重要而广泛的应用。该类元件是硬脆性难加工材料，为保证其加工精度，必须严格控制超精密加工环境。机床配套辅助设备一般都会产生热、振动等，从而影响超精密加工环境。以本课题组自主研制的大尺寸高精度平面磨床2MK1760为例，配套辅助设备包括精密油冷却机、液压油泵和精密水冷机等，其发热和振动会严重影响超精密加工过程。因此必须对超精密机床的配套设备进行隔离，通常会采取放置于洁净车间之外及用密封隔音箱封闭等措施，这样就给操作人员监控机床加工环境带来很多不便。为保证操作人员能方便地监控超精密加工环境，查看加工环境历史数据，并及时发现和解决突发...Advanced optical components such as high-precision flat and aspheric optical lens, are widely used in high-tech fields of defense and civilian. And as the typical brittle and hard materials, the ultra-precision machining environment must be strictly controlled to achieve the stable machining accuracy and surface quality. However, the auxiliary equipments of machine tool generally produce heat, vib...学位：工学硕士院系专业：物理与机电工程学院_测试计量技术及仪器学号：1992011115280
