Conference Name:2nd International Conference on Multi-Functional Materials and Structures. Conference Address: Qingdao, PEOPLES R CHINA. Time:OCT 09-12, 2009.The polycrystalline V(2)O(5) films as the anode in V(2)o(5) /LiPON /LiCoO(2) lithium microbattary were prepared by RF magnetron sputtering system. The V(2)O(5) films' crystal structures, surface morphologies and composition were characterized and analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). The microbatteries were fabricated by micro electro-mechanical system (MEMS) technology. The battery active unit area is 500 mu m X 500 mu m, and the thickness of V(2)O(5), LiPON and LiCoO(2) films was estimated to be 200, 610, and 220nm, respectively. The discharge volumetric capacity is between 9.36 mu Ahcm(-2)mu m(-1) and 9.63 mu Ahcm(-2)mu m(-1) after 40 cycles
