High quality Multi Quantum Well Structure by MOVPE

Abstract

【中文摘要】 利用金属有机气相沉积技术生长InGaAsP/InP多量子阱结构,通过改变生长程序,得到了优化的陡峭量子阱界面.并利用光致发光(PL)和X射线双晶衍射对其界面质量分析,X射线双晶衍射表明界面起伏为一个原子层厚度,在10K温度下PL谱半峰高宽(FWHM)为7meV 【英文摘要】 Multi quantum well interface quality is one of key factors that affect device performance. Metalorganic vapor phase epitaxial (MOVPE) grown InGaAsP/InP multi quantum well structure are studied. Abruptness optimization of interfaces is carried out by means of a different gas switching sequences. Analysis of x-ray and photoluminescence (PL) are used to provide detailed information about the interfaces. Measured and simulated rocking curves of Xray diffraction show monolayer fluctuations at the interfaces...福建省青年重点基

    Similar works